화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2005년 가을 (10/28 ~ 10/29, 건국대학교)
권호 9권 2호
발표분야 정보,전자소재
제목 Low-resistance Ni/Rh and Ni/Au/Rh ohmic contacts on p-type GaN
초록 GaN–based compound semiconductors have attracted great interest for applications to optoelectronic devices,such as LED, LD, and UV photo-detectors.[1,2] For the realization of high-quality devices, it is essential to make low-resistance ohmic contacts. In this study, we have investigated Ni/Rh and Ni/Au/Rh metal schemes for ohmic contacts to p-GaN. Mechanisms are suggested to explain the ohmic behavior of Ni/Rh and Ni/Au/Rh contacts on p-GaN.
Reference
[1] S . Nakamura, Science 281, 956 (1999).
[2] S . Nakamura , M. Senoh , N. Iwasa, and S. Nagahama, Jpn. J. Appl. Phys.,Part 2 34, L797 (1995).
저자 박정우, 김동유
소속 광주과학기술원
키워드 Light Emitting Diode; Ohmic contact
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