초록 |
Two-dimensional (2D) materials have provided us exciting opportunities to explore nanoscale secrets and hidden theories in a-few-atom thickness. Unique properties of 2D materials have been utilized to achieve novel electronics and multi-functions, which cannot be realized in conventional materials. However, large-scale synthesis technique should be first developed for practical commercialization of 2D materials. Here we report large-scale growth methods based on chemical vapor deposition for graphene, 2D semiconducting materials (MoS2 and WS2), and 2D oxides (MoO3). A novel method for identification of grains and grain boundaries was also developed by selectively damaging the relatively reactive grain boundaries of graphene. In addition, the surface characteristics of 2D materials were modified by treating the surface through frequency-tunable plasma. Hydrophilicity and conductivity of graphene was controlled via plasma treatment for non-destructive patterning and bio applications. Through the same strategy, thickness of black phosphorus was controllably reduced layer-by-layer. Finally, device performance of 2D materials was greatly improved by adapting van der Waals heterostructures and optimizing contact structures. Our results enable us to take a step further toward advanced applications of 2D materials. |