초록 |
The treatment of block copolymer thin film with its solvent vapor has been known as an effective way to control both orientation of microdomains with respect to the substrate and their registration into a well defined periodic lattice structure. Poly(styrene-b-ethylene oxide) has been utilized to demonstrate a microdomain structure ordered perpendicular to the surface. One of the main limitation is, however, the difficulty of making uniform thin polymer on wafer scale due to dewetting of the film upon the exposure of the solvent vapor. In order to control the dewetting of the film, we introduced self-assembled monolayers between polymer film and substrate. The broad range of surface polarity induced by various end functionalized alkanethiol SAMs allows us the systematic study of the dewetting and microdomain orientation on the substrate. |