화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2002년 가을 (10/11 ~ 10/12, 군산대학교)
권호 27권 2호, p.330
발표분야 분자전자 부문위원회
제목 Organic-Inorganic Hybrid for Nano-Phase Separation
초록 Among the various low-k candidate materials, nanoporous organosilicates composed with nano-sized pores and inorganic matrix. The nano-pores can be generated by decomposition of nano-separated heat decomposable polymer, porogen. The control of nano-phase separation is most important and very complex to achieve, since one has to adjust size of porogen, its polarity, interfacial interaction of two materials, thermal process, etc.. Otherwise, too large phase separation would occur and which will deteriorate the electrical and mechanical properties of materials.
Combination of reactive silsesquioxane and reactive porogen can be utilized to prevent early stage of phase separation between matrix and porogen. In this study, we combined several star-shaped porogens and reactive silsesquioxane as matrix precursor with various porogen contents. The mechanical, optical and electrical properties such as hardness, refractive index, dielectric constant, etc. were characterized after coating on substrate.
저자 이새내1, 안창훈*2, 석상일*3, 최길영, 김정수**, 진문영
소속 1한국화학(연), 2*한국화학(연), 3**충남대
키워드 low-k; nanoporous
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