| 초록 |
Vinyl addition norbornene polymers exhibit good properties including very high glass transition temperature, high optical transparancy and low dielectric constant. We introduced the thermally labile group to the polynorbornene backbone as grafted copolymer for multi chip module packaging material. And we synthesized the polynorbornene that is incorporated of vinyl functional pendant group for the purpose of matrix vitrification. Thermogravimetric analysis(TGA) was executed under nitrogen. Thermally labile group began to be decomposed over 250℃. We fabricated polynorbornene graft copolymer thin films and decomposed the thermally labile group at 250℃, then we got nanoporous thin films. Nanoporous thin films were characterized by ellipsometry, FE-SEM, FT-IR and so on. |
