| 학회 |
한국화학공학회 |
| 학술대회 |
2004년 봄 (04/23 ~ 04/24, 공주대학교) |
| 권호 |
10권 1호, p.46 |
| 발표분야 |
고분자 |
| 제목 |
A study on thermal embossing method for fabrication of nano-pattern stamper |
| 초록 |
The PDMS mold were produced easily and uniformly by using thermal embossing. Quartz master for embossing procedure are made using electron beam lithography which is 100∼500 nm size of line and dot type. Thermal embossing must allow for pressure(10-2 torr) and temperature(70℃). The PDMS mold is placed on a fluid mixture of prepolymer and monomer after a brief hardening process and then the master is removed. The results show that various patterns are successfully fabricated the nanoscle features. The replicated mold would be useful a stamper fabrication for injection molding.
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| 저자 |
김태완, 김동학
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| 소속 |
순천향대 |
| 키워드 |
thermal embossing; PDMS; nano pattern
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| E-Mail |
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| 원문파일 |
초록 보기 |
