| 학회 | 한국재료학회 |
| 학술대회 | 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔) |
| 권호 | 22권 2호 |
| 발표분야 | F. 광기능/디스플레이 재료 분과 |
| 제목 | Ultrathin Flexible Transparent Oxide Thin-Film Transistor via Inorganic Laser Lift-Off Process |
| 초록 | The augmented reality (AR) have recently come into the spotlight with attentions to hyper-connected society. AR is a technology that provides immediately the users with proper information about solution of facing situations using display. Particularly, the ultrathin flexible active-matrix organic light-emitting diode technology is feasible solution because it has higher refresh rates and faster response time than passive-matrix. Oxide TFT backplane technology have received attention as a vital switching and driving component of thin film electronics due to its high performance and optical transparency. Many research groups have reported manufacture processes for ultrathin, flexible and transparent oxide TFT. Almost researches have drawbacks that thin film devices fabricated by those methods exhibited poor carrier mobility by low-annealing temperature or non-compatibility with LSI due to inherent characteristics utilized materials. In this research, we suggest a conceptual stratagem for the fabrication of ultrathin, flexible, transparent, and high performance oxide TFT array via an inorganic based laser lift-off (ILLO) fabrication process. The oxide TFT array was deposited on an inorganic exfoliation layer and transparent glass substrate, and then transferred to plastic substrate via ILLO fabrication process. Structure design of oxide TFT device was constructed by finite element method (FEM) simulation to avoid damages during laser-assisted exfoliation process. The transferred oxide TFTs showed an improved field-effect mobility for channel aspect ratios (W/L) of 10/20 um, low subthreshold swing, and excellent stability at elevated temperature and negative/positive bias on ultrathin PET substrate of 4 um thickness in order to attach to human skin and confirm its functionality as wearable electronics. |
| 저자 | 이한얼, 이승현, Daniel J. Joe, 임태홍, 이건재 |
| 소속 | KAIST |
| 키워드 | Flexible; Oxide thin film; Transistor; Laser lift-off; Excimer laser; Ultrathin plastic |
