| 초록 |
Macroporous SiC patterns on Si-substrates using SiO2 and polystyrene templates showed different morphology and thermal properties. The macroporous patterns were prepared by infiltrating SiC precursors into sacrificial templates which were stocked into the PDMS channels by capillary force and MIMIC(micromolding incapillaries) method. After cured at 70℃, the composites were pyrolyzed up to 800℃. In the case of SiO2, the templates was etched off by 10% diluted HF. As a result, macroporous SiC patterns on the substrates obtained from polystyrene templates showed the higher stability and less weight loss at high temperature. The morphology and physical properties were analyzed using Scanning Electron Microscopy(SEM), nitrogen adsorption isotherms, X-ray powder diffraction(XRD) and Thermal Gravimetric Analysis(TGA). |
