| 초록 |
Various types of interlayers between SiOx layers, such as organic silicone coating, ZnO and inorganic SiOx coating, were prepared by plasma enhanced chemical vapor deposition (PECVD) on polyethylene napthalate (PEN) substrate and water vapor transmission properties were investigated by changing the middle layer. Diethyl zinc and hexamethyl disiloxane were used as precursors of ZnO and SiOx coating, respectively. To deposit ZnO coating, reactive ion etching and PECVD mode were applied. The minimum water vapor transmission rates (WVTRs) of < 10-3 g/m2/day was observed when ZnO and orgacin SiOx were applied as a middle layer between inorganic SiOx layers. |
