화학공학소재연구정보센터
학회 한국재료학회
학술대회 2004년 봄 (05/14 ~ 05/14, 강릉대학교)
권호 10권 1호
발표분야 반도체 II (화합물)
제목 Pulsed laser deposition법으로 증착된 Co doped TiO2-δ 박막의 강자성과 전기적 특성
초록 Dilute magnetic semiconductors have received considerable attention because of their combined mgnetic and transport properties, which are desiable for spintronics applications. Recently, it has been reported that ferromagnetic state exists in Co-doped anatase TiO2 and Co doped Rutile TiO2 semiconductors at room temperature.

Here, We have used pulsed laser deposition to grow reduced rutile Ti1-xCoxO2-δ (x=0~0.5) for various Co concentration, and have measured the magnetic properties and electrical properties of the resulting films. we deposited films onto R-Al2O3(1102) substrates for reduced rutile (101) structure in vacuum(~10-6 torr) at substrate temperature of 700oC. X-ray diffraction (XRD) was carried out to determine the crystal structure and preferred orientation of the films. Atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) were used the structual characterization of films. Magnetic measurements were performed using a dc superconducting quantum interference device (SQUID) magnetometer and a vibrating sample magnetometer with the magnetic field applied parallel to the film surface. The Hall effect of the films was measured with a four probe method at room temperature. The magnetization measurement showed room temperature ferromagnetism. The Ms of Ti0.97Co0.03O2-δ thin films were about 10emu/cm3 at room temperature. In Hall measurements, the reduced Co-doped rutile films have high carrier concentrations(1021-1022) and show an anomalous Hall effect (AHE) behavior at 300K.
저자 성낙진, 이우성, 윤순길
소속 충남대
키워드 Thin film; TiO2; DMS; ferromagnetics; Hall effect
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