초록 |
The ideal one-dimensional structure of carbon nanotubes (CNTs) lends them various attractive properties such as tunable conductivity, extremely high electron mobility, and large charge capacity. Owing to their molecular scale dimension and peculiar electronic properties, CNTs are considered promising building blocks for future nanoelectronics. However, development of a robust large-scale organization process for CNTs remains a formidable challenge, In this study, we demonstrate a novel hybrid approach combining a plasma-enhanced CVD (PECVD) process with self-assembled block copolymer nanotemplates for producing a hierarchically organized vertical CNT arrays. The morphology of individual CNTs as well as three-dimensional organization of CNTs, including diameter, nanoscale and large scale lateral distribution, and the degree of vertical alignment were all independently tunable. |