| 초록 |
Silane (SiH4) is one of the most important starting materials used for producing high pure polycrystalline silicon. The quality of semiconducting silicon is mainly determined by the purity of silane. The best method to prepare ultra-high grade silane is distillation, because the boiling point of silane is lower than those of all chlorosilanes and impurities such as chlorides and hydrides of boron, phosphorus, and arsenic. The silane can be obtained by redistribution of trichlorosilane in promising method for it. According to the literature the best catalyst for the disproportionation of trichlorosilane are ion-exchange resins combining catalytic active functional group such as tertiary amine or quaternary ammonium group. New type catalyst system containing a heterocyclic base, such as pyrrolidine, piperidine, as functional group at polystyrene resin were synthesized. And then the redistribution activity of the synthesized catalysts was tested under various conditions (reaction temperature, contact time) and compared with five commercial ion-exchange resins. |
