| 학회 | 한국재료학회 |
| 학술대회 | 2016년 봄 (05/18 ~ 05/20, 여수 디오션리조트 ) |
| 권호 | 22권 1호 |
| 발표분야 | B. 나노화학/바이오 재료 분과 |
| 제목 | Fabrication and Characterization of Gas and Moisture Getter base on Nanoporous SiO2/Si Substrate |
| 초록 | Getter is a substance that is deliberately placed inside various vacuum devices for the purpose of improving the efficiency of vacuum by the chemical interaction between getters and gases. The existing metal getters have a protective passivation layer that is produced during its manufacture. In order to use getter, high temperature is needed for activation, resulting in the unavoidable deleterious effects on overall devices. Therefore, it is essential to synthesizing the getter without activation temperature to improve device efficiency and gas-adsorption properties by controlling the structures and getter materials. In the study, we fabricated getter materials using metal and metal oxide such as PdOx, SiO2, Pt and Ag which can be used as getter materials to adsorb hydrogen gas and moisture. The nanoporous substrate on silicon wafer prepared by etching process can be applied to a high-efficiency gas and moisture absorber due to their large specific surface area. The structure was characterized by SEM, XRD, and XPS. The gas and moisture sorption of getter was obtained by using each the chemisorption, moisture-sorption equipment without activation process. |
| 저자 | 엄누시아1, 좌용호1, 임효령1, 조정호2, 정영훈2 |
| 소속 | 1한양대, 2한국세라믹기술원 전자소재부품센터 |
| 키워드 | Getter; Hydrogen Adsorption; Moisture sorption; Nanoporous SiO2/Si substrate |
