초록 |
Organic electronics is an extensively studied subject opening new horizons in electronics technology. It has attracted great attention as a technology to enable flexible devices through solution processing of materials. However, device patterning still remains a hurdle due to problems with chemical processing. Recently, we identified supercritical carbon dioxide and hydrofluoroethers as universal, non-damaging solvents for non-fluorinated materials. These unique solvents expand processing options from the two-dimensional plane to three-dimensional space. Taking advantage of those noble solvents and fluorinated photoresists, we were able to make patterns of functional organic materials down to 5 μm. Furthermore, our orthogonal processing method has been applied to the fabrication of a patterned polymer light-emitting device. In this presentation, a detailed discussion on our orthogonal processing strategy employing scCO2 and HFEs will be delivered. |