| 초록 |
To elaborate the applicability of the electrokinetic micro power generation, our research group is conducting design and fabrications of the silicon-glass as well as the PDMS-glass microfluidic chips with the unique features of multi-channel. Besides miniaturizing the device, the key advantage of our microfluidic chip utilization lies on the reduction in water flow rate. Both a distributor and a collector taking the tapered duct geometry are positioned with aiming the uniform distribution of water flow into each channel of the chip, in which several hundreds of single microchannels are assembled in parallel. A proper methodology is developed accompanying the deep reactive ion etching as well as the anodic bonding, and optimum process conditions necessary in hard and soft micromachining are presented. More effective device using pile-up disk-type chip will also be discussed. Performance evaluation shows that the silicon-glass microchannel leads to increasing streaming potential and higher external current compared to those of the PDMS-glass microchannel. It is very useful to recognize that a material inducing higher magnitude of zeta potential has the advantage for obtaining higher power density under the same external resistance.
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