| 학회 | 한국고분자학회 |
| 학술대회 | 2005년 가을 (10/13 ~ 10/14, 제주 ICC) |
| 권호 | 30권 2호 |
| 발표분야 | 기능성 고분자 |
| 제목 | Fabrication of Two-photon Ceramic Microstructures by Photohydrosilylation Reaction Via Stereolithography |
| 초록 | The precursor process for SiC ceramics, pyrolysis after solidifying liquid-state inorganic polymer, has drawn much attention since the pioneering work of Yajima. In comparison with the conventional ceramic process, this process serves more complicate and high-resolution structures. In this process, the resolution and the geometry of the ceramic structures are concluded by the solidifying process. And many techniques such as micro machining, soft-lithography and lithography have been developed for the solidifying step. In this study, nano-stereolithography process employing two-photon absorption is used for the step of solidifying liquid-state inorganic polymer. Nano-stereolithography is recognized as a promising technique for 3D fabrication with sub-diffraction-limit resolution. In previous research, diverse two-photon polymerizable materials such as SCR-500, SU-8, Ormocer, and PDMS have been used. To the best of our knowledge for the first time, we have described a novel method to fabricate microstructures of inorganic preceramic polymers by two-photon 3D microfabrication method via photohydrosilylation. (η5-cyclopentadienyl) Trialkylplatinum was employed as a two-photon absorption(TPA) initiator for photohydrosilylation of commercially available inorganic preceramic polymers. The liquid precursor polymer was loaded with 1wt% of TPA initiator and was photocuried using 200mw laser power for few ms exposure time. Reference [1] M. Birot, J. P. Pillot and J. Dunogues, Chem. Rev., 95 (1995), pp.1443~1477 [2] H.Yang and P. Deschatelets, Adv. Mater., 13, 1 (2001), pp.54~58 [3] L.A. Liew, W. Zhang, V. M. Bright, L. An, M. L. Dunn, R. Raj., Sens. Actuators A, 95, 120 (2002), pp.64~70 [4] S. Kawata, H.B. Sun, T. Tanaka, K. Takada, Nature, 412 (2001), pp.697~698 [5] W. H. Teh, U.Durig, G. Salis, R. Harbers, U. Drechsler, R.F. Mahrt, C.G. Smith, H.J.Guntherodt, App. Phys. Lett., 84, 20 (2004), pp.4095~4097 [6] J. Serbin, A. Egbert, A. Ostendorf, B.N. Chichkov, B. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Frohlich, M. Popall, Opt. lett., 28, 5 (2003), pp.301~303 [7] C.A. Coenjarts, C.K. Ober, Chem. Mater., 16 (2004), pp.5556~5558 [8] Larry D. Boardman, Organometallics,1992, 11, pp.4194~4201 |
| 저자 | 이동훈1, 김동표1, 임태우2, 박상후2, 양동렬2 |
| 소속 | 1충남대, 2KAIST 기계공학과 |
| 키워드 | Stereolithography; inorganic polymer; wo-photon absorption |
