| 초록 |
For advanced ULSI microelectronic devices, it is expected that an insulating material should have its dielectric constant lower than 2.0 around 2005. In this regards, this goal can be achieved only through incorporation of air into the insulator. Recently, branched polymers have been considered as nanotemplating materials for generating nanoporous films. In this study, several branched molecules with ethylene glycol and propylene glycol units were synthesized as the pore-generating materials by organic synthetic method, and characterized by NMR, GPC and graphite plate laser desorption/ionization time-of-flight mass spectroscopy (GPLDI-TOF MS). Their thermal decomposition behaviors were investigated by thermalgravimetric analysis (TGA). The porosity and dielectric values demonstrate the potential of these materials as nanosized pore-generators.
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