화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2005년 가을 (10/28 ~ 10/29, 건국대학교)
권호 9권 2호
발표분야 정밀화학
제목 Sensor Device Based on Photoluminescent Porous Silicon Chip
초록 Nanocrystalline porous silicon films have been used as sensor chip in the device to detect the vapors of nitroaromatic compounds such as nitrobenzene (NB), 2,4-dinitrotoluene (DNT), 2,4,6-trinitrotoluene (TNT), and picric acid (PA) in gas phase. Porous silicon chips were prepared by an electrochemical etch of n-type silicon (phosphorous doped, <100> orientation). Three different types of porous silicon chips have been used for the detection of analytes. One is freshly etched porous silicon chips and others are surface-derivatized porous silicon chips with divinyltetraphenylsilole or hydrocarbon by hydrosilylation. Detection limit for the 4 ppb of TNT vapors are 15 sec. In the control experiment, the intensity of photoluminescence of a porous silicon sample was found to be stable for one hour under a flow of pure air. Further details will be presented.
저자 조성동, 김범석, Arun Kummar Sharma, 송진우, 권형준, 권용희, 장승현, 손홍래
소속 조선대
키워드 Nanocrystalline; porous silicon films; sensor chip; NB; TNT; DNT; PA
E-Mail