| 학회 | 한국재료학회 |
| 학술대회 | 2004년 봄 (05/14 ~ 05/14, 강릉대학교) |
| 권호 | 10권 1호 |
| 발표분야 | 세라믹스 |
| 제목 | 고주파 마그네트론 스퍼터링 법에 의해 증착된 YIG(Yittrium Iron Garnet) 박막의 결정화 조건에 따른 자기적 특성 연구 |
| 초록 | We investigated the effects of processing parameters, including temperatures and oxygen partial (PO2), on the crytallization behaviour of amorphous YIG(Y3Fe5O12) films deposited on both thermally oxidised Si and GGG(111) single crystal substrates by RF-magnetron sputtering methods at room temperaure. As-deposited amorphous films were crystallized by the post-annealing at various temperatures in some different atmospheres. While the crystallization temperature of amorphous YIG films on oxidised Si was above ~700oC in air, it was lowered in a reduced oxygen atmosphere (PO2 = 500 ppm), and thus crystalliazation occurred at ~ 685oC. For the case of YIG films on GGG, it was much lowered below 600oC. With increasing the annealing temperature up to 900oC, the saturation magnetization (Ms) was increased and the highest Ms value was 1400G. Microstructure observation revealed that micro-crack networks were formed in all films. Overlapped resonance peaks by multi-resonance modes were found on measured FMR data of YIG films on oxidised-Si and FMR linewith(ΔH) values were about 40~50Oe. However, YIG films on GGG(111) exhibited very narrow ΔH of 7~9 Oe with a single resonance mode. * This work was supported in part by the Korean Science and Engineering Foundation through the Research Center for Advanced Magnetic Materials at Chung-nam National University. |
| 저자 | 강영민, 위성훈, 유상임 |
| 소속 | 서울대 |
| 키워드 | YIG; Sputtering; FMR |
