| 학회 |
한국고분자학회 |
| 학술대회 |
2015년 가을 (10/06 ~ 10/08, 대구컨벤션센터(EXCO)) |
| 권호 |
40권 2호 |
| 발표분야 |
분자전자 부문위원회 II |
| 제목 |
Preparation of Photo-Patterned ZnO Film for Low-Voltage Oxide Thin Film Transistors using Polymeric Zinc Acrylate |
| 초록 |
Metal oxide thin film transistors (TFTs) have attracted considerable attention as an alternatives to silicon-based devices for use as the various electronic applications such as display backplane, and integrated sensor because of the advantage of favorable electrical performance, and uniformity. Solution-processes are more promising techniques to prepare oxide semiconductor films compared to vacuum deposition methods because of low manufacturing costs. However, the solution-processed oxide semiconductor films need additional patterning processes including photolithography or direct-printing methods. In this study, we prepared a photo-patterned zinc oxide thin films by using a photosensitive organic compound as the zinc precursor of oxide semiconductors. It might be possible to develop a very simple and eco-friendly film patterning process. We prepared the ZnO TFT with the low-voltage operation within ± 3 V, by utilizing Al2O3/TiO2 laminate film as a dieletric layer. |
| 저자 |
박찬언1, 김세현2, 장재영3, 장진혁1, 백용화1, 김예별1, 김래호1, 박선욱1, 정용진1
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| 소속 |
1포항공과대, 2영남대, 3한양대 |
| 키워드 |
transistor; oxide; polymer
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| E-Mail |
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