| 초록 |
Lead zirconate titanate, known as PZT, was discovered in the late 1950’s is used as a piezoelectric material. There are many piezoelectric materials, but in the aspect of permittivity, electromechanical coupling coefficient, and pyroelectrical response, PZT shows high performance. PZT thin films are fabricated by sol-gel, MOCVD and so on. Among these methods, MOCVD seems to be the best process because other methods have drawbacks in achieving constant ratio, limitation of mass production, and purity problem. General MOCVD precursors are Phthd2, Zr(OPr)4, and Ti(OiPr)4, but Pbthd2 has low vapor pressure, and bad decomposition behavior compared with Ti and Zr precursors. Therefore we synthesized Pb2+ and Pb4+ precursors. In case of Pb2+, precursor which used aminoalcohol ligand showed good vapor pressure, so we modified aminoalcohol ligand to synthesis better precursor in viewpoint of volatility. Next in Pb4+, precursors were synthesized by coordinating ligands with two phenyl ligands as stabilizer. Pb precursors were defined by IR, NMR, TGA, X-ray crystallography, and thermal decomposition and spin coating with sol-gel mixed with Ti, Zr precursors verified PZT. |
