| 학회 |
한국화학공학회 |
| 학술대회 |
2007년 봄 (04/19 ~ 04/20, 울산 롯데호텔) |
| 권호 |
13권 1호, p.1036 |
| 발표분야 |
재료 |
| 제목 |
Fabrication of Positive and Negative Structures via Scanning Probe Lithography |
| 초록 |
Scanning probe lithography (SPL) has been recently applied to produce a variety of multilevel-structure and to fabricate small component of the miniaturized device, because a site-defined small features (＜100 nm) with spatial resolution can be repeatedly formed at a low cost, as compared with the conventional lithography techniques. The area patterned by AFM anodic oxidation has different chemical properties from the non-patterned area, and thus site-selective modification of patterned surface is quite possible. In this study, we combine the SPL with self-assembly method and/or wet etching method for the fabrication of positive and/or negative 3D micro/nano-structure. These locally modified surfaces could then be used to induce the site-selective self-assembly of various materials (i.e., nanoparticles, biomaterials) based on a pre-described pattern. |
| 저자 |
최인희1, 홍수린1, 이정진1, 이수승1, 양영인1, 김영훈2, 이종협1
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| 소속 |
1서울대, 2광운대 |
| 키워드 |
AFM anodic oxidation; Scanning probe lithography; self-assembly; Si structure; wet etching
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| E-Mail |
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| 원문파일 |
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