| 초록 |
To explain the formatoin of pores in Low dielectric constant thin film, in-situ grazing-incidence small angle x-ray scattering (GISAXS) measurements were performed on nanoporous methylsilsesquioxane (MSSQ) films that were generated by triethoxysilyl-terminated star-shaped poly(ε-caprolactone)s (PCLs) with six arms. GISAXS and thermogravimetric analysis (TGA) were excuted under vacuum and nitrogen respectively with a heating rate of 2℃/min. We obtained the data for a series of films where the initial porogen loading range from 10-40%. Subsequent heating to 400℃ results in the thermal decomposition and volatilization of PCLs components from vitrified PMSSQ matrix. Porogens began to be decomposed over 300℃ and the decomposition were finally finished at below 400℃. And the scattering invariants that were obtained from GISAXS pattern are in agreement with TGA data. The radii of pores that were calculated by Guinier fit are not changed as temperature increasing. This fact tell that the moment progen and MSSQ are mixed, they exist in phase separation. |
