| 초록 |
The inorganic-organic hybrid multilayer on the plastic substrate was investigated to prevent the permeation of water vapor and oxygen. The conventional plasma CVD using HMDSN and Ar, O2 was used to deposit inorganic layer with on the substrate. To improve the inorganic barrier layer adhesion on the substrate, UV curable organic layer with consisting of a polymer matrix and a nanofiller was coated. The multilayers with high barrier properties were successfully deposited. The barrier properties were measured by the WVTR and OTR. The depostited layer and adhesion stability were characterized using IR, AFM & tape-full test. To characterized organic-inorganic multilayer deposited PES substrate, we also measured tranmittance, RI, etc. The interfacial layer structures on which the adhesion stability were dependent were studied. The multilayers deposited on PES substrate was found be effective to increase the barrier property compared with uncoated PES substrate for flexible display. |
