| 초록 |
Waveguide type optical sensors could give useful versatilities of reliable sensing devices that detect or measure physical transitions. In this study, MZI type hybrid optical concentration sensor fabricated using fluorinated polymer (Optopol-HSP Polymer) with good optical transparency and reliability. Fluorinated polymer was synthesized to give about 40,000~50,000 molecular weight and PAG added for photoresist application. PAG modified polymers were applied to form over-cladding by a spin coater over SiO2 core on Si wafer, and then patterned via UV exposure as microlithography technology and then patterns of over clad were examined by a-step and SEM. Surface textures and wet etching conditions of over-clad have changed according to etchant types, such as Cyclohexanone, Xylene, IPA that have differences in a polarity and solubility. Resulting MZI type hybrid waveguide circuits were investigated as a concentration sensor. This work was supported by CPMD at CNU. |
