학회 | 한국화학공학회 |
학술대회 | 1999년 봄 (04/23 ~ 04/24, 성균관대학교) |
권호 | 5권 1호, p.1689 |
발표분야 | 재료 |
제목 | ’Wet Colloid 방법’을 이용한 투명한 SiC 박막의 제조 |
초록 | A new method in preparing thin SiC films on a polyethylene glycol (PEG) self-assembled silicon substrate is described.The stable colloidal dispersion of nano-sized (30 nm of average particle size)β-SiC aqueous solution was used as a starting material.By simply adding sodium dodecylsulfate (SDS) onto the solution containingPEG self-assembled silicon substrate at room temperature and pH 3, dense andthin SiC films can be formed on the substrate through a controlled coagulation ofcolloidal SiC. The resulting SiC films are transparent with 4μm thickness. |
저자 | 조규진, 문일식 |
소속 | 순천대 |
키워드 | transparent SiC thin films; wet colloid method; self-assembled |
원문파일 | 초록 보기 |