초록 |
Three-Dimensional (3D) submicron structures have found a number of applications as photonic crystals, phononic crystals as well as bioscaffolds. Recently, Holographic Interference Lithography (HIL) has been proposed as a fast and efficient alternative technique that allows one to create 1D, 2D and 3D patterns with large-area and defect-free coverage. Additionally, with this technique one can have increased control over the cell geometry and volume fraction which are very relevant in photonics or phononics. This talk provides an overview of the fabrication of 3D structures via IL (e.g. the formation of interference patterns and several requirements for the photoresist) and highlights some of our recent efforts in the applications of these 3D structures in photonic crystals and phononic crystals. My talk concludes with perspectives on the future directions in which this technique could be pursued. |