| 학회 |
한국재료학회 |
| 학술대회 |
2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔) |
| 권호 |
16권 1호 |
| 발표분야 |
E. Frontiers of Materials Research(선도 재료연구) |
| 제목 |
Development of a Novel Embedded Resistor with High Stability for a PWB Application |
| 초록 |
A Ta3N5-Ag nanocomposite thin film resistor with high resistivity and a near zero temperature coefficient of resistance was fabricated on bismaleimide triazine. This study evaluated the thermal stability and electrical properties of a Ta3N5-Ag nancocomposite thin film resistor deposited on the organic substrate. The fabricated thin film resistor was deposited with benzocyclobutane and T3N5 thin films to decrease the level of thermal degradation, such as oxidation and agglomeration. The change in resistance of the fabricated Ta3N5/Ta3N5-Ag/Ta3N5 thin film resistor with a sheet resistance and temperature coefficient of resistance of 2.28 kΩ/□ and -42 ppm/℃, respectively, on bismaleimide triazine after aging at 250 ℃ for 300 min could be controlled to ＜ 3.5% by post-annealing. |
| 저자 |
김태유, 서수정, 박인수
|
| 소속 |
성균관대 |
| 키워드 |
Thin film resistor; Embedded resistor; Tantalum nitride; Protective layer
|
| E-Mail |
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