| 학회 |
한국공업화학회 |
| 학술대회 |
2007년 가을 (11/02 ~ 11/03, 한경대학교) |
| 권호 |
11권 2호 |
| 발표분야 |
정보전자소재 |
| 제목 |
Additive Soft-Lithographic Patterning of PDMS Resists on Electronic Materials |
| 초록 |
We have developed a novel technique for the fabrication of submicron-sized polydimethylsiloxane (PDMS) resist patterns on electronic material substrates using decal transfer lithography (DTL) and reactive ion etching (RIE). The present work describes a new advance in one form of DTL patterning that appears to hold exceptional promise as a means for transferring sub-micron feature sizes, ones appropriate for use as resists in electronics fabrication processes, over large substrate areas. |
| 저자 |
안희준 |
| 소속 |
한양대 |
| 키워드 |
Soft Lithography; Patterning; Decal Transfer Lithography
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| E-Mail |
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