| 학회 | 한국재료학회 |
| 학술대회 | 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔) |
| 권호 | 22권 2호 |
| 발표분야 | H. 한-일 재료공학 워크샵 |
| 제목 | Adsorption properties for low molecular weight volatile organic compounds in fluorocarbon thin films deposited onto quartz crystal by an r.f. sputtering and spin coating |
| 초록 | Simple and accurate detection methods for volatile organic compounds (VOCs) are required. A quartz crystal microbalance (QCM) is one such method and many studies [1]-[4] have been carried out on the deposition of metallic, inorganic and organic thin films onto QCM surfaces for use as sensors. In particular, organic thin films have complex molecular structures, and potential to show characteristic adsorption properties for the VOC vapors. Many reports on chemical structures and chemical bonding states of the organic thin films prepared by physical vapor deposition (PVD) methods, i.e., vacuum evaporation and r.f. sputtering. Structures of these organic thin films are sometimes different from those of the pristine materials. In this study, we reveal that fundamental adsorption properties of organic thin film prepared by an r.f. sputtering with poly(tetrafluoroethylene) (PTFE) target deposited onto a QCM electrode. In particular, we discuss adsorption phenomenon of low molecular weight alcohols. The adsorption mass for the low molecular weight alcohols, e.g.. methanol, ethanol and 1-propanol is increased with an increase of these alcohol concentrations. The adsorption mass of the thin film deposited onto the QCM by the r.f. sputtering was much higher than that of the thin film deposited by the spin coating. Sensitivities in the organic thin film prepared by an r.f. sputtering with the PTFE target and PTFE thin film prepared by the spin coating for low concentration these aliphatic alcohols were 0.58 and 0.078μmol / g-thin film / ppm, respectively. The sensitivities for these aliphatic alcohols are almost the same level [5]. |
| 저자 | Yasutaka OHNISHI1, Satoru IWAMORI2 |
| 소속 | 1Tokai Univ., 2Kanagawa |
| 키워드 | poly(tetrafluoroethylene) (PTFE); r.f. sputtering; quartz crystal microbalance (QCM); low molecular weight alcohol; adsorption |
