| 학회 |
한국재료학회 |
| 학술대회 |
2011년 가을 (10/27 ~ 10/29, 신라대학교) |
| 권호 |
17권 2호 |
| 발표분야 |
B. Nanomaterials and Processing Technology(나노소재기술) |
| 제목 |
Effects of growth temperature on ZnO nanorods deposited by metalorganic chemical vapor deposition |
| 초록 |
Zinc oxide (ZnO) nanorods have been widely investigated for thieir potential applications to gas sensors, nanotransistors, and light-emitting diode(LED). ZnO nanorods improve the diode efficiency by increasing the carrier injection rate through nanosized contacts in LED. In this study, vertically aligned ZnO nanorods on c-plane sapphire were fabricated by metal-organic chemical vapor deposition (MOCVD). Water (H2O) and diethyl zinc (Zn(C2H5)2, DEZn) were used as oxygen and zinc precursor, respectively. Argon gas is used as the carrier gas for the DEZn. We fabricated the ZnO nanorods by controlling the growth temperature of Tg = 400~700℃, and fixed working pressure as 100 Torr to observe the growth behavior. The crystal alignment and growth orientation analysis of the ZnO were measured ω-rocking curve and Φ-scan by high resolution x-ray diffraction. The ZnO nanorods grown at 500~600℃ have a better crystalline quality. Morphology of the well oriented ZnO nanorods at 600℃ were observerd by field emission scanning electron microscopy. |
| 저자 |
Ki-sun Park1, A-young Kim2, Samseok Jang1, Do Han Lee2, Hyun Jae Kim1, Dongjin Byun2
|
| 소속 |
1Department of Material Science & engineering, 2Korea Univ. |
| 키워드 |
ZnO; nanorod; MOCVD
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| E-Mail |
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