| 초록 |
Dielectric barrier discharge (DBD) is an effective atmospheric-pressure plasma source to generate reactive species for surface treatment. In this work, the characteristics of the atmospheric-pressure DBD reactors are experimentally and numerically analyzed to control the generation and transport of atomic oxygen (AO) for the direct and remote treatment of substrate surfaces. Two kinds of DBD reactors are compared: discharge plasma for direct treatment and jet plasma for remote treatment. Distinct discharge mode transition inside a DBD reactor is reviewed with AO generation for the direct treatment, and the transport characteristics of species ejected from a reactor is investigated in the jet plasma. Finally, the direct and remote plasma process effects are discussed in the metal treatment by surface characteristics analysis and AO generation. |
