| 초록 |
In patterned media, the bits do not contain as many grains as those in conventional media, where each bit is defined by only a single grain. This technology allows storage densities to climb near 1 Tb/in2, more than 5 times the density currently available in production of HDD. To realize patterned media, however, it is imperative that magnetic materials with high perpendicular magnetic anisotropy (PMA), capable of maintaining their magnetization in the size of a few to several tens of nanometers, are developed, along with low cost and high throughput nanopatterning technology. In this study, we focused on the magnetic properties of a Co-Pt thin film and the development of NIL processes to fabricate patterned media. Co-Pt thin films were fabricated using electrodeposition. For nanoscale patterning, NIL was performed under various process conditions. The nanopatterns of dot arrays were fabricated by EBL, which were then replicated by a polymer mold. Finally, Co-Pt dot arrays with a 50 nm diameter were fabricated by NIL and electrodeposition and characterized.
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