| 학회 |
한국고분자학회 |
| 학술대회 |
2014년 가을 (10/06 ~ 10/08, 제주 ICC) |
| 권호 |
39권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Sub-10 nm TiO2 Nanosheet Arrays by Incorporating the Spacer-Defined Double-Patterning Process with Block Copolymer Template |
| 초록 |
A novel approach for fabricating ultrahigh-density sub-10 nm TiO2 nanosheet arrays with high aspect ratios by incorporating the spacer-defined double-patterning process with nanoline templates via atom layer deposition (ALD) was demonstrated. A nanoline template can be fabricated readily by pattern transfer from a thin silicon-containing block copolymer film into a thick crosslinked organic polymer layer. The excellent thermal stability of the crosslinked organic template allowed the high-temperature ALD process to deposit the TiO2 thin film conformally on the nanoline template. After the template was removed using dry etching and calcination, a highly crystalline anatase TiO2 nanosheet array with a length of several micrometers was obtained. The thickness of the resulting TiO2 nanosheet could be controlled below half the space of the originally defined nanoline template by incorporating the spacer-defined double-patterning process using ALD. |
| 저자 |
박창홍, 조경천, 정경옥, 김진백
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| 소속 |
한국과학기술원 |
| 키워드 |
nanoline template; TiO2 nanosheet; atom layer deposition; spacer-defined double-patterning process
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| E-Mail |
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