초록 |
Fully functional electronic systems on flexible substrate have drawn keen attention due to the mechanical flexibility, excellent portability, and lightweight. In particular, Flexible display will open up fresh possibilities for the next big things in display. In this regard, thin film transistors (TFTs) formed directly on flexible substrate has been studied for past decade, including low-temperature solution processing, organic TFTs. These approaches, however, have shown inferior performance compared to TFTs on glass. To realize flexible TFTs with high performance, we introduced laser lift-off (LLO) technique to transfer TFTs onto flexible substrate. The fabricated TFTs on glass were successfully transferred onto flexible substrates by optimizing LLO process. The transferred TFTs have stable mechanical properties and maintained its electric performance on flexible substrate during bending state. The obtained results may open up new possibilities for realizing flexible display. |