| 학회 |
한국고분자학회 |
| 학술대회 |
2014년 봄 (04/10 ~ 04/11, 대전 컨벤션센터) |
| 권호 |
39권 1호 |
| 발표분야 |
플렉시블 디스플레이(분자전자 부문위원회) |
| 제목 |
Effect of substrate temperature on the morphology and water vapor transmission property of ZnO film on polymer substrate by plasma enhanced chemical vapor deposition. |
| 초록 |
Zinc oxide (ZnO) thin films were deposited on polyethylene naphthalate (PEN) substrate by plasma enhanced chemical vapor deposition (PECVD) and the substrate temperature was set at 30°C and 130°C. The morphology and the water vapor transmission rate (WVTR) of the film were studied. The morphology was slightly changed with increasing substrate temperature. However, the deposition rate of the film was 20 nm/min at 30C and it decreased to 8 nm/min at 130C. The WVTR of single layer ZnO was about 6.0 g/m2/day and that of SiOx/ZnO/SiOx/PEN structure was 1 x 10-3 g/m2/day at 30°C. |
| 저자 |
송준용, 정현옥, 박규대, 강원준, 김정용, 김성룡
|
| 소속 |
한국교통대 |
| 키워드 |
ZnO; plasma
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| E-Mail |
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