| 학회 | 한국화학공학회 |
| 학술대회 | 2009년 가을 (10/22 ~ 10/23, 일산 KINTEX) |
| 권호 | 15권 2호, p.2202 |
| 발표분야 | 재료 |
| 제목 | Preparation of Anodic Aluminum Oxide Nano-template Using Al/Ti/Si substrate |
| 초록 | Titanium and aluminum films were deposited on silicon by RF magnetron sputtering. The thickness of the titanium and aluminum films is about 100 nm and 3 μm, respectively. Anodized aluminum oxide (AAO) nano-templates were prepared using the above Al/Ti/Si substrates. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template. ACKNOWLEDGMENTS This work was supported by the National Center for Nanomaterials Technology through Yeungnam University in 2009. |
| 저자 | Lan Shen, Zhengbin Gu, 박진호 |
| 소속 | 영남대 |
| 키워드 | AAO; template; Electrochemistry; Structural properties |
| 원문파일 | 초록 보기 |
