화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2010년 봄 (04/22 ~ 04/23, 대구 EXCO)
권호 16권 1호, p.400
발표분야 생물화공
제목 Silicon Nanowire Fabrication based on UV-assisted Nanoimprint Lithography for the Detection of Dopamine
초록 Ultraviolet-nano imprint lithography(UV-NIL) is one of the most promising key techniques in the growth of nanoscale lithographic technology. By using UV-NIL, we have produced 100 nm wide silicon nanowire patterns. The electrical property of silicon nanowire and metal electrodes were confirmed by semiconductor parameter analyzer. The devices have been used for the detection of dopamine, which is mainly concerned with thedepression and Parkinsonism. we have obtained graphs of electric change and the proposed techniques could be applied to nanoscale biochip field.Acknowledgments : This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Education, Science and Technology(2009-0069113) and by Ministry of Knowledge Economy(MKE) and Korean Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for strategic Technology.And this work was supported by Ministry of Education, Science & Technology(MEST) and National Research Foundation of Korea(NRF)through Nuclear R&D Program, 2009(No. 2009-00939907) .
저자 김 한1, 이진호1, 정희수2, 정건영2, 최정우1, 오병근1
소속 1서강대, 2GIST
키워드 UV-Nanoimprint Lithography (UV-NIL); biosensor; dopamine
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