| 학회 |
한국고분자학회 |
| 학술대회 |
2009년 봄 (04/09 ~ 04/10, 대전컨벤션센터) |
| 권호 |
34권 1호 |
| 발표분야 |
고분자 가공/복합재료 |
| 제목 |
Low-cost Fabrication of a Transparent Hard Replica Mold using SiO2-TiO2 sol-gel for Imprinting Lithography |
| 초록 |
We introduce a new and cost-effective fabrication method for transparent and hard replica mold for imprinting lithography such as NIL and S-FIL. The method is founded on the use of replica hard mold from master using polymer copy as a carrier. In order to preserve intrinsically damage due to the direct contact between a master and a polymer on substrate and the contamination of master in imprinting process, a hard mold was replicated from master using the polymer copy as a carrier. We suggest a SiO2-TiO2 sol-gel process for mold fabrication under low temperature (45°C) and low-pressure (~0.3MPa), and flexible polymer copy as carrier for replicating a transparent hard mold from original master pattern. As this replica mold is transparent and has a highly hardness as well as a glass, it has a potential for imprinting lithography such as NIL and S-FIL. |
| 저자 |
김주희, 이민정, 조민경, 이지수, 최혜민, 임성희, 정정미, 김연상
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| 소속 |
이화여자대 |
| 키워드 |
nanoimprint lithography; nonconventional lithography; replica hard mold; hybrid inorganic materials; sol-gel process
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| E-Mail |
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