화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2010년 가을 (10/07 ~ 10/08, 대구 EXCO)
권호 35권 2호
발표분야 기능성 고분자
제목 Adhesion Performance and Morphology with SEM Images in Si-wafer Manufacture Process
초록 The aim of this study is to check the performance of acrylic PSAs in si-wafer manufacture process and estimate the degree of residue after peeling with a SEM or a microscopy. Using a UV-curing system, UV-curable PSAs were prepared by blending polymerized PSAs, a photoinitiator and hexa-functional acrylic monomer. The UV-curable PSAs were coated onto polyester (PET) films and cured using conveyor belt type UV-curing equipment with a 100 W high pressure mercury lamp (main wavelength: 365 nm). The peel strength was measured using a Texture Analyzer. The peel strength was determined at a 180o angle with a crosshead speed of 300 mm/min at 20oC based on ASTM D3330. The peel strength is the average force on the debonding process. The force was recorded in g units for 5 different runs and the average force was reported in g/25 mm.
저자 이승우, 박지원, 김현중
소속 서울대
키워드 Adhesion; Performance; Morphology; SEM
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