| 학회 |
한국공업화학회 |
| 학술대회 |
2011년 봄 (05/11 ~ 05/13, 제주국제컨벤션센터) |
| 권호 |
15권 1호 |
| 발표분야 |
수처리용 혁신 분리막 개발 |
| 제목 |
MINS master mold fabrication with silicon nanowire template |
| 초록 |
Patterning technique is well-established technology in the field of semiconductor fabrication. Patterned membraneat micro/nanoscale can lead to enhanced performance. To achieve low-cost, large-area patterning of membrane surface with nanoscale features, metal-assisted electroless Si etching is introduced and applied to the fabrication of polymer master mold for the patterning. Various aspects of Si nanowire template fabrication and replication of master mold from the template will be demonstrated and discussed. |
| 저자 |
강달영 |
| 소속 |
연세대 |
| 키워드 |
master mold; Si nanowire; patterned membrane
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| E-Mail |
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