검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization Kelly J, Kamineni V, Lin X, Pacquette A, Hopstaken M, Liang Y, Amanapu H, Peethala B, Jiang L, Demarest J, Shobha H, Raymond M, Haran B Journal of the Electrochemical Society, 166(1), D3100, 2018 |