산화질소 검출용 마이크로 가스센서 제조공정

김정식; 윤진호; 김범준; Jung-Sik Kim; Jin-Ho Yoon; Bum-Joon Kim

Korean Journal of Materials Research, Vol.23, No.6, 299-303, June, 2013

DOI10.3740/MRSK.2013.23.6.299 Export Citation

산화질소 검출용 마이크로 가스센서 제조공정

MEMS-Based Micro Sensor Detecting the Nitrogen Oxide Gases

김정식^†, 윤진호, 김범준

서울시립대학교 신소재공학과

Jung-Sik Kim^†, Jin-Ho Yoon, and Bum-Joon Kim

Department of Materials Science and Engineering, The University of Seoul, Seoul 130-743, Korea

E-mail:

In this study, a micro gas sensor for NOx was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about 2 mm × 2 mm. Indium oxide as a sensing material for the NOx gas was synthesized by a sol-gel process. The particle size of synthesized In2O3 was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance (Rs=Rgas/Rair), occurred at 300oC with a value of 8.0 at 1 ppm NO2 gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the NO2 gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

Keywords:gas sensor;indium oxide;nitrogen oxides;sol-gel process;MEMS

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[1] Taguchi N, Japan Patent, no. 45-38200 (1962). (1962)

[2] Williams DE, Sens. Actuators B: Chem., 57, 1 (1999)

[3] Jones E, The pellistor catalytic gas detector, in: P. T. Mosley and B. C. Tofield (Eds.), Solid State Gas Sensors, p. 17-24, Adam Hilger, Bristol, UK (1987). (1987)

[4] Chung WY, Lee DD, Thin Solid Films, 200, 329 (1991)

[5] Levy M, J. Physique Coll., 6, 41 (1980)

[6] Tones TA, Firth JG, Mann B, Sens. Actuators B:Chem., 8, 281 (1985)

[7] Saji K, in Proc. Int. Meet. on Chemical Sensors (Fukuoka, Japan, 1983) p. 171. (1983)

[8] Shaver PJ, Appl. Phys. Lett., 11, 255 (1967)

[9] Loh JC, Japan Patent, no. 43-28560 (1967) (1967)

[10] Yoon JH, Kim JS, Solid State Ion., 192(1), 668 (2011)

[11] Kim BJ, Lee HJ, Yoon JH, Kim JS, Sens. Lett., 10(1-2), 1 (2012)

[12] Kim SD, Kim BJ, Yoon JH, Kim JS, J. Kor. Phys. Soc., 51(6), 2069 (2007)

[13] Ivanov P, Llobet E, Blancoa F, Vergara A, Vilanova Z, Gracia I, Cane C, Correig X, Sens. Actuators B:Chem., 118, 311 (2006)

[14] Siciliano T, Tepore A, Micocci G, Serra A, Manno D, Filippo E, Sens. Actuators B: Chem., 133(1), 321 (2008)