검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Low-temperature synthesis of conducting boron-doped nanocrystalline silicon oxide thin films as the window layer of solar cells Samanta S, Das D Current Applied Physics, 23, 42, 2021 |
| 2 |
Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz Gago R, Sanchez-Garrido O, Climent-Font A, Albella JM, Roman E, Raisanen J, Rauhala E Thin Solid Films, 338(1-2), 88, 1999 |
| 3 |
Electron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation Matsui J, Shibata M, Nakano N, Makabe T Journal of Vacuum Science & Technology A, 16(1), 294, 1998 |