검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Electrical properties of AlN thin films deposited at low temperature on Si(100) Aardahl CL, Rogers JW, Yun HK, Ono Y, Tweet DJ, Hsu ST Thin Solid Films, 346(1-2), 174, 1999 |
| 2 |
AlN thin films prepared by ion beam induced chemical vapour deposition Sanchez-Lopez JC, Contreras L, Fernandez A, Gonzalez-Elipe AR, Martin JM, Vacher B Thin Solid Films, 317(1-2), 100, 1998 |
| 3 |
Chemical Etching of Ion-Beam Deposited AlN and AlN-H Huang L, Wang XD, Hipps KW, Mazur U, Heffron R, Dickinson JT Thin Solid Films, 279(1-2), 43, 1996 |
| 4 |
(Ti1-xAlx)N Coatings by Plasma-Enhanced Chemical-Vapor-Deposition Lee SH, Ryoo HJ, Lee JJ Journal of Vacuum Science & Technology A, 12(4), 1602, 1994 |
| 5 |
Microstructure and Thermal-Conductivity of Epitaxial AlN Thin-Films Kuo PK, Auner GW, Wu ZL Thin Solid Films, 253(1-2), 223, 1994 |