화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Alternative phosphorus-doped amorphous silicon using trimethylphosphine diluted in hydrogen
Terasa R, Albert M, Bartha JW, Roessler T, Abramov AS, Kosarev AI, Kuduyarova V, Vinogradov A
Thin Solid Films, 427(1-2), 270, 2003
2 Photoinduced effects in RF and VHF a-Si : H films deposited with different ion bombardment
Abramov AS, Kosarev AI, Cabarrocas PRI, Shutov MV, Vinogradov AJ
Thin Solid Films, 383(1-2), 178, 2001
3 Effect of Ion-Bombardment in Very-High Frequency Glow-Discharge on Growth and Properties of Sihx Films
Kosarev AI, Smimov AS, Abramov AS, Vinogradov AJ, Ustavschikov AY, Shutov MV
Journal of Vacuum Science & Technology A, 15(2), 298, 1997