검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulation of electron beam lithography of nanostructures Stepanova M, Fito T, Szabo Z, Alti K, Adeyenuwo AP, Koshelev K, Aktary M, Dew SK Journal of Vacuum Science & Technology B, 28(6), C6C48, 2010 |
| No. | Article |
|---|---|
| 1 |
Simulation of electron beam lithography of nanostructures Stepanova M, Fito T, Szabo Z, Alti K, Adeyenuwo AP, Koshelev K, Aktary M, Dew SK Journal of Vacuum Science & Technology B, 28(6), C6C48, 2010 |