검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of Diamond-Like Carbon-Films Grown by Super-Wide Electron-Cyclotron-Resonance Plasma-Assisted Chemical-Vapor-Deposition Ishii A, Amadatsu S, Minomo S, Taniguchi M, Sugiyo M Journal of Vacuum Science & Technology A, 12(4), 1068, 1994 |
| 2 |
Super-Wide Electron-Cyclotron-Resonance Plasma Source Excited by Traveling Microwave as an Efficient Tool for Diamond-Like Carbon-Film Deposition Ishii A, Amadatsu S, Minomo S, Taniguchi M, Sugiyo M, Sakaguchi Y, Kobayashi T Journal of Vacuum Science & Technology A, 12(4), 1241, 1994 |