화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Low resistance ohmic contact to p-type GaN using Pd/lr/Au multilayer scheme
Bae JW, Hossain T, Adesida I, Bogart KH, Koleske D, Allerman AA, Jang JH
Journal of Vacuum Science & Technology B, 23(3), 1072, 2005
2 Effects of Plasma Processing Parameters on the Surface Reactivity of Oh(X-2-Pi) in Tetraethoxysilane/O-2 Plasmas During Deposition of SiO2
Bogart KH, Cushing JP, Fisher ER
Journal of Physical Chemistry B, 101(48), 10016, 1997
3 Plasma-Enhanced Chemical-Vapor-Deposition of SiO2 Using Novel Alkoxysilane Precursors
Bogart KH, Dalleska NF, Bogart GR, Fisher ER
Journal of Vacuum Science & Technology A, 13(2), 476, 1995