검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
SiO2 to Si Selectivity Mechanisms in High-Density Fluorocarbon Plasma-Etching Kirmse KH, Wendt AE, Disch SB, Wu JZ, Abraham IC, Meyer JA, Breun RA, Woods RC Journal of Vacuum Science & Technology B, 14(2), 710, 1996 |
| 2 |
Ponderomotive Effects in Helicon Plasmas Brown RD, Gilland JH, Hershkowitz N, Breun RA Journal of Vacuum Science & Technology A, 13(3), 865, 1995 |
| 3 |
Fourier-Transform Infrared-Absorption Spectrometry Measurements of a CF4 Discharge in an Electron-Cyclotron-Resonance Reactor Goeckner MJ, Henderson MA, Meyer JA, Breun RA Journal of Vacuum Science & Technology A, 12(6), 3120, 1994 |